Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11701661 | Method and system for localized heating by illumination of patterned thin films | Austin So | 2023-07-18 |
| 11648563 | Method and system for heating and temperature measurement using patterned thin films | Austin So | 2023-05-16 |
| 11628442 | Method and system for reaction vessel with multisided energy sources | — | 2023-04-18 |
| 11597055 | Carrier head of polishing apparatus and membrane used therein | Sung-Ho Shin | 2023-03-07 |