Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850700 | Sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems | Jeonghoon Oh, Roger M. Johnson, Van H. Nguyen | 2023-12-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850700 | Sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems | Jeonghoon Oh, Roger M. Johnson, Van H. Nguyen | 2023-12-26 |