Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11788007 | Method for removing hard masks | Emanuel I. Cooper, Min-Chieh Yang | 2023-10-17 |
| 11697767 | Silicon nitride etching composition and method | Steven M. Bilodeau, SeongJin Hong, Min-Chieh Yang, Emanuel I. Cooper | 2023-07-11 |