Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11748869 | Image-based overlay targets incorporating features for pattern recognition and moire fringe patterns for measurement | Martin Weiss, Apratim Dhar | 2023-09-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11748869 | Image-based overlay targets incorporating features for pattern recognition and moire fringe patterns for measurement | Martin Weiss, Apratim Dhar | 2023-09-05 |