Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11826876 | Hydrophilic and zeta potential tunable chemical mechanical polishing pads | Sivapackia Ganapathiappan, Boyi Fu, Ashwin CHOCKALINGAM, Daniel Redfield, Rajeev Bajaj +3 more | 2023-11-28 |
| 11709422 | Gray-tone lithography for precise control of grating etch depth | Elliott Franke, Nihar Mohanty, Austin Lane, Matthew E. Colburn | 2023-07-25 |
| 11685014 | Formulations for advanced polishing pads | Sivapackia Ganapathiappan, Boyi Fu, Venkat Hariharan, Mayu YAMAMURA, Mario CORNEJO +5 more | 2023-06-27 |
| 11543584 | Inorganic matrix nanoimprint lithographs and methods of making thereof with reduced carbon | Giuseppe Calafiore, Tingling Rao, Peter Topalian | 2023-01-03 |