Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837492 | Electrostatic chuck having a gas flow feature, and related methods | Yan Liu, Steven Donnell, Caleb Minsky, Chun Wang Chan | 2023-12-05 |
| 11742781 | Electrostatic chuck with charge dissipation coating | Yan Liu, Steven Donnell, Chun Wang Chan | 2023-08-29 |
| 11612972 | Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methods | Yan Liu, Steven Donnell, Chun Wang Chan, Caleb Minsky | 2023-03-28 |