Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11574796 | Dual XY variable aperture in an ion implantation system | Jun Lu, Frank Sinclair, Michael Honan | 2023-02-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11574796 | Dual XY variable aperture in an ion implantation system | Jun Lu, Frank Sinclair, Michael Honan | 2023-02-07 |