Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693053 | Bode fingerprinting for characterizations and failure detections in processing chamber | Tao Zhang, Upendra Ummethala | 2023-07-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693053 | Bode fingerprinting for characterizations and failure detections in processing chamber | Tao Zhang, Upendra Ummethala | 2023-07-04 |