Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11487208 | Process liquid for extreme ultraviolet lithography and pattern forming method using same | Su Jin Lee, Seung Hun Lee, Seung Hyun Lee | 2022-11-01 |
| 11488834 | Method for forming silicon or silicon compound pattern in semiconductor manufacturing process | Su Jin Lee, Seung Hun Lee, Seung Hyun Lee | 2022-11-01 |
| 11315788 | Etching method for forming micro silicon pattern in semiconductor manufacturing process | Su Jin Lee, Seung Hun Lee | 2022-04-26 |
| 11294287 | Photoresist pattern shrinking composition and pattern shrinking method | Seung Hun Lee, Seung Hyun Lee, Su Jin Lee | 2022-04-05 |