Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11292023 | Substrate processing apparatus | Woo-Young Park, Ja-Hyun Koo, Chang Hee Han, Sung-Eun Lee, Byoung Guk Son +2 more | 2022-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11292023 | Substrate processing apparatus | Woo-Young Park, Ja-Hyun Koo, Chang Hee Han, Sung-Eun Lee, Byoung Guk Son +2 more | 2022-04-05 |