Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11483924 | Substrate support structure and method of forming the same | Hidehiko Shimizu, Shinji Kawai | 2022-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11483924 | Substrate support structure and method of forming the same | Hidehiko Shimizu, Shinji Kawai | 2022-10-25 |