Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454491 | Systems having light source with extended spectrum for semiconductor chip surface topography metrology | Sicong Wang | 2022-09-27 |
| 11448499 | Systems and methods for semiconductor chip surface topography metrology | Sicong Wang | 2022-09-20 |
| 11243067 | Systems and methods for semiconductor chip surface topography metrology | Sicong Wang, Yi Zhou | 2022-02-08 |