Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342204 | Method and apparatus for cleaning semiconductor wafers | Chang-Hyeon Nam | 2022-05-24 |
| 11233058 | Semiconductor device and method for fabricating the same | Chang-Hyeon Nam | 2022-01-25 |