Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538696 | Semiconductor processing apparatus and sealing device | Dea-Jin Kim | 2022-12-27 |
| 11328893 | Plasma processing system | — | 2022-05-10 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538696 | Semiconductor processing apparatus and sealing device | Dea-Jin Kim | 2022-12-27 |
| 11328893 | Plasma processing system | — | 2022-05-10 |