Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264242 | Method and apparatus for determining expansion compensation in photoetching process, and method for manufacturing device | Changlin Zhao, Yunpeng ZHOU | 2022-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264242 | Method and apparatus for determining expansion compensation in photoetching process, and method for manufacturing device | Changlin Zhao, Yunpeng ZHOU | 2022-03-01 |