Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450531 | Atomic layer etching method | Jin-Sung Chun, Sang Jun Park, Byung Chul Cho, Kwang Seon JIN | 2022-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450531 | Atomic layer etching method | Jin-Sung Chun, Sang Jun Park, Byung Chul Cho, Kwang Seon JIN | 2022-09-20 |