Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11244845 | Vacuum chamber arrangement and method for processing a substrate | Joerg Pollack, Lutz Gottsmann | 2022-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11244845 | Vacuum chamber arrangement and method for processing a substrate | Joerg Pollack, Lutz Gottsmann | 2022-02-08 |