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Takuya Tsushima

EB Ebara: 1 patents #62 of 158Top 40%
Overall (2022): #237,842 of 548,613Top 45%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11236434 Device that holds substrate in substrate holder and/or releases holding of substrate using substrate holder, and plating apparatus including the same 2022-02-01