Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11333227 | Assembly having a first chamber and at least one second chamber | — | 2022-05-17 |
| 11282725 | Wafer transfer unit and wafer transfer system | Martin Netzer, Andreas Hofer, Eligio Belleri, Marco Apolloni, Thomas L. Swain | 2022-03-22 |