Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11340578 | Machine control system, machine controller, and vibration suppression command generation method | Atsuro Tandai, Yasuhiro Suzuki | 2022-05-24 |
| 11335615 | Wafer accommodation container | Masayuki Nishijima | 2022-05-17 |