Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11292764 | Cyclic sulfonate compounds as photoacid generators in resist applications | Yongqiang Zhang | 2022-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11292764 | Cyclic sulfonate compounds as photoacid generators in resist applications | Yongqiang Zhang | 2022-04-05 |