Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11319627 | Vacuum processing apparatus | — | 2022-05-03 |
| 11239063 | Vacuum processing apparatus | — | 2022-02-01 |
| 11239064 | Magnet unit for magnetron sputtering apparatus | Shinya Nakamura | 2022-02-01 |
| 11230760 | Sputtering apparatus and method of forming film | Shinya Nakamura | 2022-01-25 |