Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11384423 | Sputtering apparatus and sputtering method | — | 2022-07-12 |
| 11286554 | Sputtering apparatus | Kanji Yaginuma | 2022-03-29 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11384423 | Sputtering apparatus and sputtering method | — | 2022-07-12 |
| 11286554 | Sputtering apparatus | Kanji Yaginuma | 2022-03-29 |