Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530483 | Substrate processing system | YoonKi Min, Younghoon Kim, SeungJu Chun | 2022-12-20 |
| 11488819 | Method of cleaning substrate processing apparatus | HakJoon Lee, YoungSim Kim | 2022-11-01 |