Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11491503 | Coating material mist remover and coating equipment | Shigeki Fujiwara, Kenji Tajima, Kai TAKISHIMA | 2022-11-08 |
| 11254029 | Wafer dividing apparatus | Takayuki Masada, Yoshihiro Kawaguchi, Tomohito Matsuda, Yuhei Fujii, Susumu Inakazu +2 more | 2022-02-22 |