Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11411364 | Line narrowing module, gas laser apparatus, and electronic device manufacturing method | Miwa Igarashi | 2022-08-09 |
| 11296513 | Station building power supply | Toshiaki Takeoka, Shuji Ishikura | 2022-04-05 |