Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11239062 | Plasma processing apparatus with heater and power frequency control | Kazuhito Yamada, Takashi Sato | 2022-02-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11239062 | Plasma processing apparatus with heater and power frequency control | Kazuhito Yamada, Takashi Sato | 2022-02-01 |