Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527968 | Method of manufacturing MEMS vibration element and MEMS vibration element | Gen Hashiguchi | 2022-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527968 | Method of manufacturing MEMS vibration element and MEMS vibration element | Gen Hashiguchi | 2022-12-13 |