Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11293096 | Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer | Masakazu Shimada, Takeshi Kasai, Kenichi Suzaki, Hirohisa Yamazaki, Yoshimasa NAGATOMI | 2022-04-05 |