Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11347147 | Metal-containing onium salt compound, photodegradable base, resist composition, and method for manufacturing device using said resist composition | Michiya Naito, Masamichi Hayakawa | 2022-05-31 |