Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448963 | Resist composition and method of forming resist pattern | Masatoshi Arai, Koshi Onishi | 2022-09-20 |
| 11275307 | Resist composition, method of forming resist pattern, polymeric compound, and compound | Masatoshi Arai, Koshi Onishi | 2022-03-15 |