Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469115 | Substrate processing apparatus, substrate processing method and recording medium | Takaya Kikai | 2022-10-11 |
| 11443964 | Substrate processing apparatus and substrate processing system | Masatoshi Kaneda, Keisuke Yoshida | 2022-09-13 |