Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437252 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Fitrianto, Yoshifumi Amano | 2022-09-06 |
| 11244820 | Substrate processing apparatus, substrate processing method, and storage medium | — | 2022-02-08 |