YU

Yasutoshi Umehara

TL Tokyo Electron Limited: 2 patents #123 of 896Top 15%
Overall (2022): #96,105 of 548,613Top 20%
2
Patents 2022

Issued Patents 2022

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11519717 Film thickness measuring system and film thickness measuring method 2022-12-06
11226191 Film thickness measurement device and correction method 2022-01-18