YK

Yasuhiro Kuga

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
Overall (2022): #204,072 of 548,613Top 40%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11393702 Heat treatment apparatus and heat treatment method Shinsuke TAKAKI, Yukinobu OTSUKA, Shinichi SAGARA 2022-07-19