Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538722 | Optical diagnostics of semiconductor process using hyperspectral imaging | Xinkang Tian | 2022-12-27 |
| 11538723 | Optical diagnostics of semiconductor process using hyperspectral imaging | Xinkang Tian | 2022-12-27 |
| 11422058 | Digital laser holography-based rapid lens center offset detection device | Xiaojin Yu, Dexiang Zeng | 2022-08-23 |