TN

Toshifumi Nagaiwa

TL Tokyo Electron Limited: 2 patents #123 of 896Top 15%
📍 Dresden, DE: #36 of 373 inventorsTop 10%
Overall (2022): #102,643 of 548,613Top 20%
2
Patents 2022

Issued Patents 2022

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11342165 Plasma processing method 2022-05-24
11264208 Plasma processing apparatus and method for controlling radio-frequency power supply of plasma processing apparatus 2022-03-01