Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527404 | Substrate processing apparatus and substrate processing method | Takashi Kamio, Kazuyoshi Yamazaki, Naoshige FUSHIMI | 2022-12-13 |
| 11335542 | Plasma processing apparatus | — | 2022-05-17 |
| 11236423 | Film-forming apparatus | Takashi Kamio, Kai Shiono | 2022-02-01 |