Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462431 | Discharging method and substrate processing apparatus | Toshiyuki ARAKANE, Yoshinori Osaki, Masanori Sato | 2022-10-04 |
| 11456199 | Measurement method and measuring jig | Ryusei KASHIMURA, Masanori Sato | 2022-09-27 |