Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476140 | Substrate accommodating unit and maintenance method for vacuum transfer unit in substrate transfer apparatus | — | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476140 | Substrate accommodating unit and maintenance method for vacuum transfer unit in substrate transfer apparatus | — | 2022-10-18 |