Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11513081 | Substrate inspection method, substrate treatment system, and computer storage medium | Makoto Hayakawa | 2022-11-29 |
| 11492017 | Information presentation device and information presentation method | Mitsuo Tamagaki, Ifushi Shimonomoto, Hiroaki Tanaka, Yuki Fujisawa, Akira Kamiya +1 more | 2022-11-08 |
| 11458982 | Drive mode switch control device and drive mode switch control method | Kunihiko Chiba, Asako Nagata, Akihiko Yagyu | 2022-10-04 |
| 11387129 | Substrate warehouse, substrate processing system, and substrate inspection method | — | 2022-07-12 |
| 11319369 | Motor control function improving agent | Fumiaki OKAHARA, Yoshitaka Koga | 2022-05-03 |
| 11267480 | Travel control apparatus and travel control method | Mitsuo Tamagaki, Hiroaki Tanaka, Ifushi Shimonomoto, Akira Kamiya, Yuki Fujisawa +1 more | 2022-03-08 |
| 11257206 | Method for correcting processing condition and substrate processing system | — | 2022-02-22 |
| 11252296 | Facsimile for displaying address confirmation, control method, and non-transitory recording medium | Akira Yokoyama, Hayato Aikawa | 2022-02-15 |