TT

Takehiro Tanikawa

TL Tokyo Electron Limited: 2 patents #123 of 896Top 15%
📍 Rifu, JP: #72 of 319 inventorsTop 25%
Overall (2022): #105,456 of 548,613Top 20%
2
Patents 2022

Issued Patents 2022

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11264260 Cleaning method and substrate processing apparatus 2022-03-01
11257691 Substrate processing apparatus 2022-02-22