TO

Takanori Obaru

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
Overall (2022): #239,273 of 548,613Top 45%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11482429 Substrate processing apparatus and substrate processing method — 2022-10-25