TM

Takahisa Mase

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
Overall (2022): #240,100 of 548,613Top 45%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11488847 Apparatus and method for heat-treating substrate Hiroyuki Miyashita, Shohei Yoshida 2022-11-01