SI

Shuji Iwanaga

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
Overall (2022): #262,519 of 548,613Top 50%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11227381 Substrate defect inspection apparatus, substrate defect inspection method, and storage medium 2022-01-18