Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404299 | Substrate transfer mechanism, substrate processing apparatus, and substrate processing method | — | 2022-08-02 |
| 11335586 | Transfer device | Takehiro Shindo | 2022-05-17 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404299 | Substrate transfer mechanism, substrate processing apparatus, and substrate processing method | — | 2022-08-02 |
| 11335586 | Transfer device | Takehiro Shindo | 2022-05-17 |