SN

Seiji Nagahara

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
Overall (2022): #266,427 of 548,613Top 50%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11353793 Method of simulating resist pattern, resist material and method of optimizing formulation thereof, apparatus and recording medium 2022-06-07