RH

Rintaro Higuchi

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
Overall (2022): #288,290 of 548,613Top 55%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11450530 Substrate processing apparatus and substrate processing method — 2022-09-20