Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437250 | Processing system and platform for wet atomic layer etching using self-limiting and solubility-limited reactions | — | 2022-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437250 | Processing system and platform for wet atomic layer etching using self-limiting and solubility-limited reactions | — | 2022-09-06 |