Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11353792 | Substrate processing apparatus | — | 2022-06-07 |
| 11256172 | Light irradiating device, light irradiating method and recording medium | Takaya Kikai, Masaru Tomono | 2022-02-22 |